Optical Engineering

Download e-book for iPad: Chemical Mechanical Polishing in Silicon Processing: Vol 63 by Shin M. Hwa Li,Robert M. Miller

By Shin M. Hwa Li,Robert M. Miller

ISBN-10: 0124014933

ISBN-13: 9780124014930

ISBN-10: 0127521720

ISBN-13: 9780127521725

due to the fact its inception in 1966, the sequence of numbered volumes referred to as Semiconductors and Semimetals has exceptional itself throughout the cautious number of famous authors, editors, and members. The Willardson and Beer sequence, because it is well known, has succeeded in generating quite a few landmark volumes and chapters. not just did lots of those volumes make an influence on the time in their book, yet they remain well-cited years after their unique unlock. lately, Professor Eicke R. Weber of the college of California at Berkeley joined as a co-editor of the sequence. Professor Weber, a well known specialist within the box of semiconductor fabrics, will additional give a contribution to carrying on with the sequence' culture of publishing well timed, hugely suitable, and long-impacting volumes. a few of the contemporary volumes, akin to Hydrogen in Semiconductors, Imperfections in III/V fabrics, Epitaxial Microstructures, High-Speed Heterostructure units, Oxygen in Silicon, and others promise that this custom should be maintained or even expanded.
Reflecting the really interdisciplinary nature of the sphere that the sequence covers, the volumes in Semiconductors and Semimetals were and may stay of serious curiosity to physicists, chemists, fabrics scientists, and gadget engineers in glossy industry.

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Read e-book online Chemical Mechanical Polishing in Silicon Processing: Vol 63 PDF

When you consider that its inception in 1966, the sequence of numbered volumes often called Semiconductors and Semimetals has special itself in the course of the cautious collection of recognized authors, editors, and participants. The Willardson and Beer sequence, because it is celebrated, has succeeded in generating quite a few landmark volumes and chapters.

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Chemical Mechanical Polishing in Silicon Processing: Vol 63 (Semiconductors and Semimetals) by Shin M. Hwa Li,Robert M. Miller


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